| Title: |
Title:
Clamping of microgears with a compliant string
|
| Authors: |
Authors:
Jantzen, Stephan, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.3, Koordinatenmesstechnik, ORCID: 0000-0001-5810-9779Meeß, Rudolf, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.5, Wissenschaftlicher Gerätebau Stein, Martin, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.3, Koordinatenmesstechnik Kniel, Karin, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.3, Koordinatenmesstechnik Dietzel, Andreas, TU Braunschweig, Institute of Microtechnology, Braunschweig, Germany |
| Contributors: |
Contributors:
HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
|
| Pages: |
Pages:
10
|
| Languages: |
Languages:
en
|
| DOI: |
DOI:
10.7795/810.20180323B
|
| Resource Type: |
Resource Type:
PTB: Conference Article,
DINI: ConferencePaper,
DataCite: ConferencePaper
|
| Publisher: |
Publisher:
Physikalisch-Technische Bundesanstalt (PTB)
|
| Rights: |
Rights:
https://creativecommons.org/licenses/by/4.0/CC BY 4.0 |
| Dates: |
Dates:
Available:
2018-03-28
Created: 2017-11-23 |
| File: |
File:
Download File
(application/pdf)
626.8 KB
MD5 Checksum: ab3678134691960ba9971e035b5545dc SHA256 Checksum: cbfb3f771ee4a1150bc5b669c98c57c8dd930e9b86b87baf64237e845e445e30 |
| Keywords: |
Keywords:
tactile dimensional metrology ;
clamping ;
microgears ;
precision engineering
|
| Abstract: |
Abstract:
We present a new clamping and handling method for microgears featuring a compliant string. The method simplifies the fixturing and setup process prior to dimensional measurements. The method has been verified experimentally and by FEM simulations. The low-cost prototype shows several advantages over conventional clamping methods like gluing or collet clamping. The clamp is part of a microenvironment that also features a particle shield, cleaning capability and sensors that monitor the direct measurement environment.
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| Other: |
Other:
This article is based on a presentation at the conference "MacroScale 2017 - Recent developments in traceable dimensional measurements", VTT MIKES Espoo, (Finnland), 17th-19th October 2017.
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-OAR
