Title: Clamping of microgears with a compliant string
Authors: Jantzen, Stephan, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.3, Koordinatenmesstechnik, ORCID: 0000-0001-5810-9779
Meeß, Rudolf, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.5, Wissenschaftlicher Gerätebau
Stein, Martin, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.3, Koordinatenmesstechnik
Kniel, Karin, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.3, Koordinatenmesstechnik
Dietzel, Andreas, TU Braunschweig, Institute of Microtechnology, Braunschweig, Germany
Contributors: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Resource Type: Text / Article
Publisher: Physikalisch-Technische Bundesanstalt (PTB)
Rights: https://creativecommons.org/licenses/by/4.0/
CC BY 4.0
Dates: Available: 2018-03-28
Created: 2017-11-23
File: Download File (application/pdf) 626.83 kB (641879 Bytes)
MD5 Checksum: ab3678134691960ba9971e035b5545dc
SHA256 Checksum: cbfb3f771ee4a1150bc5b669c98c57c8dd930e9b86b87baf64237e845e445e30
Keywords tactile dimensional metrology ; clamping ; microgears ; precision engineering
Abstract: We present a new clamping and handling method for microgears featuring a compliant string. The method simplifies the fixturing and setup process prior to dimensional measurements. The method has been verified experimentally and by FEM simulations. The low-cost prototype shows several advantages over conventional clamping methods like gluing or collet clamping. The clamp is part of a microenvironment that also features a particle shield, cleaning capability and sensors that monitor the direct measurement environment.
Other: This article is based on a presentation at the conference "MacroScale 2017 - Recent developments in traceable dimensional measurements", VTT MIKES Espoo, (Finnland), 17th-19th October 2017.