Title: Dataset for the publication "Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements"
Authors: Xu, Min, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik
Li, Zhi, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik, ORCID: 0000-0002-7931-2992
Fahrbach, Michael, Technische Universität Braunschweig, Braunschweig, ORCID: 0000-0003-1027-9968
Peiner, Erwin, Technische Universität Braunschweig, Braunschweig, ORCID: 0000-0001-5801-813X
Brand, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik, ORCID: 0000-0002-4293-4982
Contributors: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Language:en
DOI:10.7795/720.20211124
Resource Type: Dataset / Measurement Data
Publisher: Physikalisch-Technische Bundesanstalt (PTB)
Rights: https://creativecommons.org/licenses/by/4.0/
CC-BY 4.0 International
Relationships: IsReferencedBy: DOI 10.3390/s21051557/
Dates: Available: 2021-11-30
Classifications: INSPEC B7000 Instrumentation and special applications ; INSPEC B7200 Measurement equipment and instrumentation systems ; INSPEC E2000 Engineering mechanics ; INSPEC E1520 Manufacturing processes ; INSPEC E1700 Manufacturing resources and products
File: Download File (application/zip) 2.18 MB (2291030 Bytes)
MD5 Checksum: 381c231d4ba50d76ad8341fc3e45d25f
SHA256 Checksum: 193687e12321879e79c28ff1ff1022bc1c07aff66031b86241e44248e46ac9e7
Keywords: surface topography measurement ; piezoresistive devices ; high-speed techniques ; surface roughness ; silicon ; cantilevers
Abstract: High-speed tactile roughness measurements set high demand on the trackability of the stylus probe. Because of the features of low mass, low probing force, and high signal linearity, the piezoresistive silicon microprobe is a hopeful candidate for high-speed roughness measurements. This paper investigates the trackability of these microprobes through building a theoretical dynamic model, measuring their resonant response, and performing tip-flight experiments on surfaces with sharp variations. Two microprobes are investigated and compared: one with an integrated silicon tip and one with a diamond tip glued to the end of the cantilever. The result indicates that the microprobe with the silicon tip has high trackability for measurements up to traverse speeds of 10 mm/s, while the resonant response of the microprobe with diamond tip needs to be improved for the application in high-speed topography measurements.
Other: EMPIR projects are co-funded by the European Union’s (EU) Horizon 2020 research and innovation programme and the EMPIR participating states.
Remark: Each data file within this dataset is related to one figure of the related publication:
Xu et al. Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements. Sensors 2021, 21, 1557. https://doi.org/10.3390/s21051557/

The data are named according to (figure No.)_(curve).asc. For example:
Fig8a_5mmPerSecond.asc
| |_data of the curve of 5mm/s
|_______for Fig.8a

Files with the extension ASC are space-separated tabular data, which can be opened with any text editor.
Funding: European Commission (EC), ISNI: 0000 0001 2162 673X, Grant Title: Multifunctional ultrafast microprobes for on-the-machine measurements, Grant Number: EMPIR 17IND05 MicroProbes