DOI:	10.7795/720.20211124
title:	Dataset for the publication "Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements".
summary:	High-speed tactile roughness measurements set high demand on the trackability of the stylus probe. Because of the features of low mass, low probing force, and high signal linearity, the piezoresistive silicon microprobe is a hopeful candidate for high-speed roughness measurements. This paper investigates the trackability of these microprobes through building a theoretical dynamic model, measuring their resonant response, and performing tip-flight experiments on surfaces with sharp variations. Two microprobes are investigated and compared: one with an integrated silicon tip and one with a diamond tip glued to the end of the cantilever. The result indicates that the microprobe with the silicon tip has high trackability for measurements up to traverse speeds of 10 mm/s, while the resonant response of the microprobe with diamond tip needs to be improved for the application in high-speed topography measurements.
creators:	Min Xu (5.1), Zhi Li (5.1), Michael Fahrbach (Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße
66, 38106 Braunschweig, Germany), Erwin Peiner (Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße
66, 38106 Braunschweig, Germany), Uwe Brand (5.1)
license:	CC-BY 4.0 International
keywords:	roughness measurement; piezoresistive microprobe; high-speed surface measurement
classification:	INSPEC B70
project title:	MicroProbes Multifunctional ultrafast microprobes for on-the-machine measurements 
funder:	The results in this paper come from EMPIR 17IND05 MicroProbes, an EU-funded project. MicroProbes has received funding from the EMPIR program co-financed by the EU participating states and from the European Union’s Horizon 2020 research and innovation program.
funder nr:	17IND05	
link to projekt homepage: https://www.ptb.de/empir2018/microprobes/

software: 

Description of the individual files

Each data file within this dataset is related to one figure of the related publication:
Xu et al. Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements. Sensors 2021, 21, 1557. https://doi.org/10.3390/s21051557/

The data is named according to (figure No.)_(curve).asc. For example:
Fig8a_5mmPerSecond.asc
|	|_data of the curve of 5mm/s
|_______for Fig.8a	

Files with the extension ASC  are space-separated tabular data which can be opened with any text editor 
