| Titel: | Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm |
| Autoren: |
Brand, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik, ORCID: 0000-0002-4293-4982 Xu, Min, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik Doering, Lutz, Physikalisch-Technische Bundesanstalt (PTB), Abteilung 1, Mechanik und Akustik, ORCID: 0000-0002-2948-5641 Langfahl-Klabes, Jannick, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik Behle, Heinrich, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik Alle Autoren anzeigen (14) |
| Beitragende: | HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887 |
| Sprache: | en |
| DOI: | 10.7795/720.20200515 |
| Art der Ressource: | Dataset / Measurement Data |
| Herausgeber: | Physikalisch-Technische Bundesanstalt (PTB) |
| Rechte: |
https://creativecommons.org/licenses/by/4.0/ CC-BY 4.0 International |
| Beziehungen: | IsPartOf: DOI 10.3390/s19061410 |
| Daten: |
Verfügbar: 2020-05-15 |
| Klassifikationen: | INSPEC A0630C Spatial variables measurement ; INSPEC A0710C Micromechanical and nanomechanical devices and systems ; INSPEC B7320C Spatial variables measurement ; INSPEC E1620 Measurement ; INSPEC E2160 Micromechanics (mechanical engineering) |
| Datei: |
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MD5 Prüfsumme: 504f665dbbc8280a59866982746291ba SHA256 Prüfsumme: b6d72ad04b10c3e2f592585ad64b7e6de52647f832d9abe0783e42c500f4178c |
| Schlagworte | cantilever microprobe ; high-speed ; contact resonance ; tip wear ; piezo-resistive ; mechanical damping ; tip-testing standard ; cantilevers ; micromechanical devices ; surface topography measurement ; shape measurement |
| Zusammenfassung: | During the past decade, piezo-resistive cantilever type silicon microprobes for high-speed roughness measurements inside high-aspect-ratio microstructures, like injection nozzles or critical gas nozzles have been developed. This article summarizes their metrological properties for fast roughness and shape measurements including noise, damping, tip form, tip wear, and probing forces and presents the first results on the measurement of mechanical surface parameters. Due to the small mass of the cantilever microprobes, roughness measurements at very high traverse speeds up to 15 mm/s are possible. At these high scanning speeds, considerable wear of the integrated silicon tips was observed in the past. In this paper, a new tip-testing artefact with rectangular grooves of different width was used to measure this wear and to measure the tip shape, which is needed for morphological filtering of the measured profiles and, thus, for accurate form measurements. To reduce tip wear, the integrated silicon tips were replaced by low-wear spherical diamond tips of a 2 µm radius. Currently, a compact microprobe device with an integrated feed-unit is being developed for high-speed roughness measurements on manufacturing machines. First measurements on sinusoidal artefacts were carried out successfully. Moreover, the first measurements of the elastic modulus of a polymer surface applying the contact resonance measurement principle are presented, which indicates the high potential of these microprobes for simultaneous high-speed roughness and mechanical parameter measurements. |
| Anderes: | EMPIR projects are co-funded by the European Union’s (EU) Horizon 2020 research and innovation programme and the EMPIR participating states. |
| Bemerkung: | Description of the individual files Each data file within this dataset is related to one figure of the related publication: Brand et al. Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm. Sensors 2019, 19, 1410. https://doi.org/10.3390/s19061410/ Files with the extension TXT, ASC, PR or SMD are space-separated tabular data which can be opened with any text editor. Files with the extension OPJ or OPJU are OriginLab project files which can be opened with the free Origin Viewer https://www.originlab.com/viewer/ (click-and-run, no installation required) |
| Förderung: | European Commission (EC), ISNI: 0000 0001 2162 673X, Grant Title: Multifunctional ultrafast microprobes for on-the-machine measurements, Grant Number: EMPIR 17IND05 MicroProbes |