Title: Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm
Authors: Brand, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik
Xu, Min, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik
Doering, Lutz, Physikalisch-Technische Bundesanstalt (PTB), Abteilung 1, Mechanik und Akustik
Langfahl-Klabes, Jannick, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik
Behle, Heinrich, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik
Bütefisch, Sebastian, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.2, Dimensionelle Nanometrologie
Ahbe, Thomas, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik
Mickan, Bodo, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 1.3, Geschwindigkeit
Peiner, Erwin, Technische Universität Braunschweig
Völlmeke, Stefan, CiS GmbH, Erfurt
Frank, Thomas, CiS GmbH, Erfurt
Kiselev, Ilia, Breitmeier Messtechnik GmbH, Ettlingen
Drexel, Michael, Breitmeier Messtechnik GmbH, Ettlingen
Hauptmannl, Michael, Breitmeier Messtechnik GmbH, Ettlingen
Contributors: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Language:en
DOI:10.7795/720.20200515
Resource Type: Dataset / Factual Data
Publisher: Physikalisch-Technische Bundesanstalt (PTB)
Rights: https://creativecommons.org/licenses/by/4.0/
CC-BY 4.0 International
Relationships: IsPartOf: DOI 10.3390/s19061410
Dates: Available: 2020-05-15
Classifications: INSPEC A0630C ; INSPEC A0710C ; INSPEC B7320C ; INSPEC E1620 ; INSPEC E2160
File: Download File (application/zip) 80.52 MB (84427550 Bytes)
MD5 Checksum: 504f665dbbc8280a59866982746291ba
SHA256 Checksum: b6d72ad04b10c3e2f592585ad64b7e6de52647f832d9abe0783e42c500f4178c
Keywords: cantilever microprobe ; high-speed ; contact resonance ; tip wear ; piezo-resistive ; mechanical damping ; tip-testing standard ; cantilevers ; micromechanical devices ; surface topography measurement ; shape measurement
Abstract: During the past decade, piezo-resistive cantilever type silicon microprobes for high-speed roughness measurements inside high-aspect-ratio microstructures, like injection nozzles or critical gas nozzles have been developed. This article summarizes their metrological properties for fast roughness and shape measurements including noise, damping, tip form, tip wear, and probing forces and presents the first results on the measurement of mechanical surface parameters. Due to the small mass of the cantilever microprobes, roughness measurements at very high traverse speeds up to 15 mm/s are possible. At these high scanning speeds, considerable wear of the integrated silicon tips was observed in the past. In this paper, a new tip-testing artefact with rectangular grooves of different width was used to measure this wear and to measure the tip shape, which is needed for morphological filtering of the measured profiles and, thus, for accurate form measurements.
To reduce tip wear, the integrated silicon tips were replaced by low-wear spherical diamond tips of a 2 µm radius. Currently, a compact microprobe device with an integrated feed-unit is being developed for high-speed roughness measurements on manufacturing machines. First measurements on sinusoidal artefacts were carried out successfully. Moreover, the first measurements of the elastic modulus of a polymer surface applying the contact resonance measurement principle are presented, which indicates the high potential of these microprobes for simultaneous high-speed roughness and mechanical parameter measurements.
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Each data file within this dataset is related to one figure of the related publication:
Brand et al. Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm. Sensors 2019, 19, 1410. https://doi.org/10.3390/s19061410/

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Funding: European Commission, Grant Title: MicroProbes Multifunctional ultrafast microprobes for on-the-machine measurements, Grant Number: EMPIR 17IND05 MicroProbes