DOI: 10.7795/720.20200515
title:	Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm

summary: 
During the past decade, piezo-resistive cantilever type silicon microprobes for high-speed roughness measurements inside high-aspect-ratio microstructures, like injection nozzles or critical gas nozzles have been developed. This article summarizes their metrological properties for fast roughness and shape measurements including noise, damping, tip form, tip wear, and probing forces and presents the ﬁrst results on the measurement of mechanical surface parameters. Due to the small mass of the cantilever microprobes, roughness measurements at very high traverse speeds up to 15 mm/s are possible. At these high scanning speeds, considerable wear of the integrated silicon tips was observed in the past. In this paper, a new tip-testing artefact with rectangular grooves of different width was used to measure this wear and to measure the tip shape, which is needed for morphological ﬁltering of the measured proﬁles and, thus, for accurate form measurements.
To reduce tip wear, the integrated silicon tips were replaced by low-wear spherical diamond tips of a 2 µm radius. Currently, a compact microprobe device with an integrated feed-unit is being developed for high-speed roughness measurements on manufacturing machines. First measurements on sinusoidal artefacts were carried out successfully. Moreover, the ﬁrst measurements of the elastic modulus of a polymer surface applying the contact resonance measurement principle are presented, which indicates the high potential of these microprobes for simultaneous high-speed roughness and mechanical parameter measurements.

creators:
Brand, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik
Xu, Min, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik
Doering, Lutz, Physikalisch-Technische Bundesanstalt (PTB), Abteilung 1, Mechanik und Akustik
Langfahl-Klabes, Jannick, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik
Behle, Heinrich, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik
Büteﬁsch, Sebastian, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.2, Dimensionelle Nanometrologie
Ahbe, Thomas, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik
Mickan, Bodo, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 1.3, Geschwindigkeit
Peiner, Erwin, Technische Universität Braunschweig
Völlmeke, Stefan, CiS GmbH, Erfurt
Frank, Thomas, CiS GmbH, Erfurt
Kiselev, Ilia, Breitmeier Messtechnik GmbH, Ettlingen
Drexel, Michael, Breitmeier Messtechnik GmbH, Ettlingen
Hauptmannl, Michael, Breitmeier Messtechnik GmbH, Ettlingen


license: CC-BY 4.0 International

keywords: cantilever microprobe; high-speed; contact resonance; tip wear; piezo-resistive; mechanical damping; tip-testing standard

classification: INSPEC A0630C ; INSPEC A0710C ; INSPEC B7320C ; INSPEC E1620 ; INSPEC E2160

project title:	MicroProbes Multifunctional ultrafast microprobes for on-the-machine measurements 

funder: The results in this paper partly come from EMPIR 17IND05 MicroProbes, an EU-funded project, and MikroRau and HMTS, two BMBF-funded projects. MicroProbes has received funding from the EMPIR program co-ﬁnanced by the EU participating states and from the European Union’s Horizon 2020 research and innovation program.	
funder nr: 17IND05	

link to projekt homepage: https://www.ptb.de/empir2018/microprobes/404.html

related objects: https://doi.org/10.3390/s19061410

software: Origin Viewer: https://www.originlab.com/viewer/

Description of the individual files

Each data file within this dataset is related to one figure of the related publication:
Brand et al. Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm. Sensors 2019, 19, 1410. https://doi.org/10.3390/s19061410/

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