Titel: |
Titel:
On the Influence of Metal Chucks in Wideband On-Wafer Measurements
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Autoren: |
Autoren:
Phung, Gia Ngoc, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0001-7157-1263Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0003-0372-2626 |
Beitragende: |
Beitragende:
HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
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Seiten: |
Seiten:
4
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Sprachen: |
Sprachen:
en
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DOI: |
DOI:
10.7795/EMPIR.18SIB09.CA.20220915C
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Art der Ressource: |
Art der Ressource:
Text / Article
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Verlag: |
Verlag:
Physikalisch-Technische Bundesanstalt (PTB)
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Rechte: |
Rechte:
Private use is allowed for non-profit purposes only.
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Datumsangaben: |
Datumsangaben:
Verfügbar: 2022-09-21 Erstellt: 2022-08-01 |
Datei: |
Datei:
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MD5 Prüfsumme: 50cf3216680954f1a5721b84a8a9a91d SHA256 Prüfsumme: 7a1896663b47ec843743b35f4a535479e50fc85c2ec33505457f87ec6a7b38e2 |
Stichwörter: |
Stichwörter:
calibration ;
coplanar waveguides ;
on-wafer ;
probes
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Zusammenfassung: |
Zusammenfassung:
On-wafer measurements are essential for the characterization of electronic devices at millimeter-wave frequencies. They have been known as challenging and ambitious containing a lot of parasitic effects. While a lot of investigations have been performed for on-wafer measurements of coplanar waveguides (CPW) placed on ceramic chucks, the parasitic effects related to the influence of metal chucks have not been fully investigated yet. This paper demonstrates a systematic study of the metal chuck in conjunction with the parasitic probe effects using two different probe types in mTRL-calibrated CPW measurements through a thorough field analysis.
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Zitat: |
Zitat:
G. N. Phung and U. Arz, "On the Influence of Metal Chucks in Wideband On-Wafer Measurements," in 2022 98th ARFTG Microwave Measurement Conference (ARFTG), 2022, pp. 1-4, doi: 10.1109/ARFTG52954.2022.9844119
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Förderung: |
Förderung:
European Commission (EC), ISNI: 0000 0001 2162 673X, Grant Title: Traceability for electrical measurements at millimetre-wave and terahertz frequencies for communications and electronics technologies, Grant Number: EMPIR 18SIB09
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