Title: |
Title:
On the Influence of Metal Chucks in Wideband On-Wafer Measurements
|
Authors: |
Authors:
Phung, Gia Ngoc, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0001-7157-1263Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0003-0372-2626 |
Contributors: |
Contributors:
HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
|
Pages: |
Pages:
4
|
Languages: |
Languages:
en
|
DOI: |
DOI:
10.7795/EMPIR.18SIB09.CA.20220915C
|
Resource Type: |
Resource Type:
Text / Article
|
Publisher: |
Publisher:
Physikalisch-Technische Bundesanstalt (PTB)
|
Rights: |
Rights:
Private use is allowed for non-profit purposes only.
|
Dates: |
Dates:
Available: 2022-09-21 Created: 2022-08-01 |
File: |
File:
Download File
(application/pdf)
6.55 MB (6864927 Bytes)
MD5 Checksum: 50cf3216680954f1a5721b84a8a9a91d SHA256 Checksum: 7a1896663b47ec843743b35f4a535479e50fc85c2ec33505457f87ec6a7b38e2 |
Keywords: |
Keywords:
calibration ;
coplanar waveguides ;
on-wafer ;
probes
|
Abstract: |
Abstract:
On-wafer measurements are essential for the characterization of electronic devices at millimeter-wave frequencies. They have been known as challenging and ambitious containing a lot of parasitic effects. While a lot of investigations have been performed for on-wafer measurements of coplanar waveguides (CPW) placed on ceramic chucks, the parasitic effects related to the influence of metal chucks have not been fully investigated yet. This paper demonstrates a systematic study of the metal chuck in conjunction with the parasitic probe effects using two different probe types in mTRL-calibrated CPW measurements through a thorough field analysis.
|
Citation: |
Citation:
G. N. Phung and U. Arz, "On the Influence of Metal Chucks in Wideband On-Wafer Measurements," in 2022 98th ARFTG Microwave Measurement Conference (ARFTG), 2022, pp. 1-4, doi: 10.1109/ARFTG52954.2022.9844119
|
Funding: |
Funding:
European Commission (EC), ISNI: 0000 0001 2162 673X, Grant Title: Traceability for electrical measurements at millimetre-wave and terahertz frequencies for communications and electronics technologies, Grant Number: EMPIR 18SIB09
|

-OAR