Title:
Title:
On the Influence of Metal Chucks in Wideband On-Wafer Measurements
Authors:
Authors:
Phung, Gia Ngoc, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0001-7157-1263
Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0003-0372-2626
Contributors:
Contributors:
HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Pages:
Pages:
4
Languages:
Languages:
en
DOI:
DOI:
10.7795/EMPIR.18SIB09.CA.20220915C
Resource Type:
Resource Type:
Text / Article
Publisher:
Publisher:
Physikalisch-Technische Bundesanstalt (PTB)
Rights:
Rights:
Private use is allowed for non-profit purposes only.
Dates:
Dates:
Available: 2022-09-21
Created: 2022-08-01
File:
File:
Download File (application/pdf) 6.55 MB (6864927 Bytes)
MD5 Checksum: 50cf3216680954f1a5721b84a8a9a91d
SHA256 Checksum: 7a1896663b47ec843743b35f4a535479e50fc85c2ec33505457f87ec6a7b38e2
Keywords:
Keywords:
calibration ; coplanar waveguides ; on-wafer ; probes
Abstract:
Abstract:
On-wafer measurements are essential for the characterization of electronic devices at millimeter-wave frequencies. They have been known as challenging and ambitious containing a lot of parasitic effects. While a lot of investigations have been performed for on-wafer measurements of coplanar waveguides (CPW) placed on ceramic chucks, the parasitic effects related to the influence of metal chucks have not been fully investigated yet. This paper demonstrates a systematic study of the metal chuck in conjunction with the parasitic probe effects using two different probe types in mTRL-calibrated CPW measurements through a thorough field analysis.
Citation:
Citation:
G. N. Phung and U. Arz, "On the Influence of Metal Chucks in Wideband On-Wafer Measurements," in 2022 98th ARFTG Microwave Measurement Conference (ARFTG), 2022, pp. 1-4, doi: 10.1109/ARFTG52954.2022.9844119
Funding:
Funding:
European Commission (EC), ISNI: 0000 0001 2162 673X, Grant Title: Traceability for electrical measurements at millimetre-wave and terahertz frequencies for communications and electronics technologies, Grant Number: EMPIR 18SIB09

Authors

Phung, Gia Ngoc, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0001-7157-1263
Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0003-0372-2626

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