Title: On the Influence of Thru- and Line-Length-Related Effects in CPW- Based Multiline TRL Calibrations
Authors: Phung, Gia Ngoc, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0001-7157-1263
Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0003-0372-2626
Contributors: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Pages:4
Language:en
DOI:10.7795/EMPIR.18SIB09.CA.20220915A
Resource Type: Text / Article
Publisher: Physikalisch-Technische Bundesanstalt (PTB)
Rights: Private use is allowed for non-profit purposes only.
Dates: Available: 2022-09-21
Created: 2021-12-17
File: Download File (application/pdf) 6.23 MB (6528450 Bytes)
MD5 Checksum: 928bbdf44f965c3d73e0cb823a163d70
SHA256 Checksum: 010adfabef9063c1a9b0fdf59403672b1cdee29c4062e8f9100c1c24f11a3b9e
Keywords: calibration ; coplanar waveguides ; on-wafer ; probes
Abstract: The quality of calibration standards in on-wafer measurements has a strong impact on the accuracy of the multiline Thru-Reflect Line (TRL) calibration. Especially the thru standard is one of the most critical calibration standards. For instance, it has been demonstrated recently that the probe effects are more pronounced, if the length of the thru is selected too small. In this case, the mTRL calibration is more sensitive towards probe coupling effects. Therefore, this paper reports on a systematic study on the impact of the thru length on the mTRL calibration accuracy. Additionally, the influence of the length of the calibration standards will be discussed together with the influence of probe and neighborhood effects for coplanar waveguides (CPW).
Citation: G. N. Phung and U. Arz, "On the Influence of Thru- and Line-Length-Related Effects in CPW- Based Multiline TRL Calibrations," in 2021 97th ARFTG Microwave Measurement Conference (ARFTG), 2021, pp. 1-4, doi: 10.1109/ARFTG52261.2021.9639909.
Funding: European Commission (EC, ISNI: 0000 0001 2162 673X, Grant Title: Traceability for electrical measurements at millimetre-wave and terahertz frequencies for communications and electronics technologies, Grant Number: EMPIR 18SIB09