Title: Potentials and capabilities of spectroscopic instruments for HCl detection
Authors: Benoy, Thomas, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 3.4, Analytische Chemie der Gasphase
Qu, Zhechao, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 3.4, Analytische Chemie der Gasphase
Werhahn, Olav, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 3.4, Analytische Chemie der Gasphase
Ebert, Volker, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 3.4, Analytische Chemie der Gasphase
Curtis, Anne, National Physical Laboratory (NPL), United Kingdom

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Contributors: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Pages:46
Language:en
DOI:10.7795/EMPIR.17IND09.RE.20200929
Resource Type: Text / Report
Publisher: Physikalisch-Technische Bundesanstalt (PTB)
Rights: Download for personal/private use only, if your national copyright law allows this kind of use.
Dates: Available: 2020-10-14
File: Download File (application/pdf) 2.02 MB (2122874 Bytes)
MD5 Checksum: 559bcaddfc44996b58b4208cdebc1285
SHA256 Checksum: 5fa072cc6a43b2f3e1b0ebd0cf50ad36267d43e0fcaffea8cbefae05278a481c
Keywords: Airborne molecular contaminants (AMC) ; HCl ; NICE-OHMS ; CRDS ; dTDLAS-WMS ; PAS
Abstract: The MetAMCII project was established to develop a robust measurement infrastructure for key AMC
species such as HCl at those trace concentrations found in cleanroom fabrication environments. This
involves development of sensitive and traceable detection methods, low uncertainty static and dynamic
reference materials to validate the optical detection techniques, measurement campaigns in cleanroom environments and metrological inter-comparison. Hence, one of the aims of the MetAMCII project is to measure trace levels of key AMC species such as HCl with a target detection of less than 1 nmol/mol in less than a minute which was, so far, difficult to achieve using classical analytical techniques. The focus of the project is on HCl, which is a critical AMC in the semiconductor manufacturing environment.
Citation: Benoy, T. ; Qu, Z. ; O. Werhahn ; et al. Potentials and capabilities of spectroscopic instruments for HCl detection, 2020. Physikalisch-Technische Bundesanstalt (PTB). DOI: https://doi.org/10.7795/EMPIR.17IND09.RE.20200929
Funding: European Metrology Programme for Innovation and Research, Other: 10.13039/100014132, Grant Title: Metrology for Airborne Molecular Contaminants II, Grant Number: 17IND09