| Titel: | Potentials and capabilities of spectroscopic instruments for HCl detection |
| Autoren: |
Benoy, Thomas, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 3.4, Analytische Chemie der Gasphase Qu, Zhechao, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 3.4, Analytische Chemie der Gasphase Werhahn, Olav, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 3.4, Analytische Chemie der Gasphase Ebert, Volker, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 3.4, Analytische Chemie der Gasphase Curtis, Anne, National Physical Laboratory (NPL), United Kingdom Alle Autoren anzeigen (10) |
| Beitragende: | HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887 |
| Seiten: | 46 |
| Sprache: | en |
| DOI: | 10.7795/EMPIR.17IND09.RE.20200929 |
| Art der Ressource: | Text / Report |
| Herausgeber: | Physikalisch-Technische Bundesanstalt (PTB) |
| Rechte: | Download for personal/private use only, if your national copyright law allows this kind of use. |
| Daten: |
Verfügbar: 2020-10-14 |
| Datei: |
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| Schlagworte | Airborne molecular contaminants (AMC) ; HCl ; NICE-OHMS ; CRDS ; dTDLAS-WMS ; PAS |
| Zusammenfassung: | The MetAMCII project was established to develop a robust measurement infrastructure for key AMC species such as HCl at those trace concentrations found in cleanroom fabrication environments. This involves development of sensitive and traceable detection methods, low uncertainty static and dynamic reference materials to validate the optical detection techniques, measurement campaigns in cleanroom environments and metrological inter-comparison. Hence, one of the aims of the MetAMCII project is to measure trace levels of key AMC species such as HCl with a target detection of less than 1 nmol/mol in less than a minute which was, so far, difficult to achieve using classical analytical techniques. The focus of the project is on HCl, which is a critical AMC in the semiconductor manufacturing environment. |
| Zitierform: | Benoy, T. ; Qu, Z. ; O. Werhahn ; et al. Potentials and capabilities of spectroscopic instruments for HCl detection, 2020. Physikalisch-Technische Bundesanstalt (PTB). DOI: https://doi.org/10.7795/EMPIR.17IND09.RE.20200929 |
| Förderung: | European Metrology Programme for Innovation and Research, Other: 10.13039/100014132, Grant Title: Metrology for Airborne Molecular Contaminants II, Grant Number: 17IND09 |