| Title: |
Title:
Impact of Chuck Boundary Conditions on Wideband On-Wafer Measurements
|
| Authors: |
Authors:
Phung, Gia Ngoc, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0001-7157-1263Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0003-0372-2626 |
| Contributors: |
Contributors:
HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
|
| Pages: |
Pages:
4
|
| Languages: |
Languages:
en
|
| DOI: |
DOI:
10.7795/EMPIR.14IND02.CA.20211104B
|
| Resource Type: |
Resource Type:
PTB: Conference Article,
DINI: ConferencePaper,
DataCite: ConferencePaper
|
| Publisher: |
Publisher:
Physikalisch-Technische Bundesanstalt (PTB)
|
| Rights: |
Rights:
Private use is allowed for non-profit purposes only.
|
| Relationships: |
Relationships:
IsVariantFormOf: DOI 10.1109/SPI52361.2021.9505192
|
| Dates: |
Dates:
Available:
2021-11-08
Created: 2021 |
| File: |
File:
Download File
(application/pdf)
3.4 MB
MD5 Checksum: fe9d331d7d38dde949f7ef3b4a4515af SHA256 Checksum: d96f5027da2fa1a10e648d4ad07f99c3e796c5a7050162a43a8d0de2b67457ee |
| Keywords: |
Keywords:
coplanar waveguides ;
leakage ;
radiation ;
surface waves
|
| Abstract: |
Abstract:
While a lot of investigations have been presented recently explaining the parasitic effects in on-wafer measurements caused by probes, neighborhood and environmental effects, this paper addresses the impact of chuck boundary conditions. Starting from a coplanar waveguide (CPW) measurement example, this paper demonstrates how the most relevant chuck parameters, i.e. thickness and relative permittivity, deteriorate the S-parameters of CPWs.
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| Citation: |
Citation:
Ngoc Phung, Gia ; Arz, Uwe. Impact of Chuck Boundary Conditions on Wideband On-Wafer Measurements. Physikalisch-Technische Bundesanstalt (PTB), 2021. DOI: https://doi.org/10.7795/EMPIR.14IND02.CA.20211104B
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| Funding: |
Funding:
European Commission (EC, ISNI: 0000 0001 2162 673X, Grant Title: Traceability for electrical measurements at millimetre-wave and terahertz frequencies for communications and electronics technologies, Grant Number: EMPIR 18SIB09
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-OAR
