Title: | Impact of Chuck Boundary Conditions on Wideband On-Wafer Measurements |
Authors: |
Phung, Gia Ngoc, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0001-7157-1263 Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0003-0372-2626 |
Contributors: | HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887 |
Pages: | 4 |
Language: | en |
DOI: | 10.7795/EMPIR.14IND02.CA.20211104B |
Resource Type: | Text / Article |
Publisher: | Physikalisch-Technische Bundesanstalt (PTB) |
Rights: | Private use is allowed for non-profit purposes only. |
Relationships: | IsVariantFormOf: DOI 10.1109/SPI52361.2021.9505192 |
Dates: |
Available: 2021-11-08 Created: 2021 |
File: |
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Keywords: | coplanar waveguides ; leakage ; radiation ; surface waves |
Abstract: | While a lot of investigations have been presented recently explaining the parasitic effects in on-wafer measurements caused by probes, neighborhood and environmental effects, this paper addresses the impact of chuck boundary conditions. Starting from a coplanar waveguide (CPW) measurement example, this paper demonstrates how the most relevant chuck parameters, i.e. thickness and relative permittivity, deteriorate the S-parameters of CPWs. |
Citation: | Ngoc Phung, Gia ; Arz, Uwe. Impact of Chuck Boundary Conditions on Wideband On-Wafer Measurements. Physikalisch-Technische Bundesanstalt (PTB), 2021. DOI: https://doi.org/10.7795/EMPIR.14IND02.CA.20211104B |
Funding: | European Commission (EC, ISNI: 0000 0001 2162 673X, Grant Title: Traceability for electrical measurements at millimetre-wave and terahertz frequencies for communications and electronics technologies, Grant Number: EMPIR 18SIB09 |