Title: Impact of Chuck Boundary Conditions on Wideband On-Wafer Measurements
Authors: Phung, Gia Ngoc, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0001-7157-1263
Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0003-0372-2626
Contributors: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Pages:4
Language:en
DOI:10.7795/EMPIR.14IND02.CA.20211104B
Resource Type: Text / Article
Publisher: Physikalisch-Technische Bundesanstalt (PTB)
Rights: Private use is allowed for non-profit purposes only.
Relationships: IsVariantFormOf: DOI 10.1109/SPI52361.2021.9505192
Dates: Available: 2021-11-08
Created: 2021
File: Download File (application/pdf) 3.35 MB (3517524 Bytes)
MD5 Checksum: fe9d331d7d38dde949f7ef3b4a4515af
SHA256 Checksum: d96f5027da2fa1a10e648d4ad07f99c3e796c5a7050162a43a8d0de2b67457ee
Keywords: coplanar waveguides ; leakage ; radiation ; surface waves
Abstract: While a lot of investigations have been presented recently explaining the parasitic effects in on-wafer measurements caused by probes, neighborhood and environmental effects, this paper addresses the impact of chuck boundary conditions. Starting from a coplanar waveguide (CPW) measurement example, this paper demonstrates how the most relevant chuck parameters, i.e. thickness and relative permittivity, deteriorate the S-parameters of CPWs.
Citation: Ngoc Phung, Gia ; Arz, Uwe. Impact of Chuck Boundary Conditions on Wideband On-Wafer Measurements. Physikalisch-Technische Bundesanstalt (PTB), 2021. DOI: https://doi.org/10.7795/EMPIR.14IND02.CA.20211104B
Funding: European Commission (EC, ISNI: 0000 0001 2162 673X, Grant Title: Traceability for electrical measurements at millimetre-wave and terahertz frequencies for communications and electronics technologies, Grant Number: EMPIR 18SIB09