Title: Anomalies in multiline-TRL-corrected measurements of short CPW lines
Authors: Phung, Gia Ngoc, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0001-7157-1263
Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder, ORCID: 0000-0003-0372-2626
Contributors: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Pages:4
Language:en
DOI:10.7795/EMPIR.14IND02.CA.20211104A
Resource Type: Text / Article
Publisher: Physikalisch-Technische Bundesanstalt (PTB)
Rights: Private use is allowed for non-profit purposes only.
Relationships: IsVariantFormOf: DOI 10.1109/ARFTG49670.2021.9425345
Dates: Available: 2021-11-08
Created: 2021
File: Download File (application/pdf) 1.86 MB (1947050 Bytes)
MD5 Checksum: f3f14f4c7bbf9b683c02f1ea7325b286
SHA256 Checksum: 8f36823deb813bae1f43beffd0f06a53c56cfe770527531a1aec0bfe680d1817
Keywords: calibration ; coplanar waveguides ; on-wafer ; probes
Abstract: Microwave probes in on-wafer measurements contribute to a number of parasitic effects deteriorating the accuracy of multiline Thru Reflect Line (mTRL) calibrations. The accuracy of mTRL calibration is especially sensitive in Devices under Test (DUTs) of shorter line length. It has been demonstrated in previous experimental studies that the calibrated results are often only reliable as long as the length of the line is at least 2 mm. However, the reasons behind this phenomenon have not yet been clarified. Therefore, this paper reports on a systematic analysis of the dependency of the mTRL calibration accuracy on probe effects with a focus on coplanar waveguides (CPW) of shorter line length. For the first time, investigations with regard to the probe effects in shorter CPWs are presented.
Citation: Ngoc Phung, Gia ; Arz, Uwe. Anomalies in multiline-TRL-corrected measurements of short CPW lines. Physikalisch-Technische Bundesanstalt (PTB), 2021. DOI: https://doi.org/10.7795/EMPIR.14IND02.CA.20211104A
Funding: European Commission (EC, ISNI: 0000 0001 2162 673X, Grant Title: Traceability for electrical measurements at millimetre-wave and terahertz frequencies for communications and electronics technologies, Grant Number: EMPIR 18SIB09