| Title: | On-wafer residual error correction through adaptive filtering of verification line measurements |
| Authors: |
Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder Savin, Aleksandr, Tomsk State University of Control Systems and Radioelectronics, Tomsk, Russia |
| Contributors: | HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887 |
| Language: | en |
| DOI: | 10.7795/EMPIR.14IND02.CA.20190403F |
| Resource Type: | Text / Article |
| Publisher: | Physikalisch-Technische Bundesanstalt (PTB) |
| Rights: | Private use is allowed for non-profit purposes only. |
| Dates: |
Available: 2019-04-08 |
| File: |
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| Keywords: | calibration ; transmission line measurements ; standards ; error correction ; microwave measurement ; frequency measurement ; measurement uncertainty |
| Abstract: | In this paper we compare the performance of a residual error correction algorithm against the performance of its predecessor and investigate its ability to second-order correct on-wafer calibrations which are widely used in industry. Independent of the calibration standard definition and the calibration method used, consistent results are obtained after applying the residual error correction. |