| Titel: |
Titel:
On-wafer residual error correction through adaptive filtering of verification line measurements
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| Autoren: |
Autoren:
Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und FelderSavin, Aleksandr, Tomsk State University of Control Systems and Radioelectronics, Tomsk, Russia |
| Beitragende: |
Beitragende:
HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
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| Sprachen: |
Sprachen:
en
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| DOI: |
DOI:
10.7795/EMPIR.14IND02.CA.20190403F
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| Art der Ressource: |
Art der Ressource:
PTB: Konferenzartikel,
DINI: ConferencePaper,
DataCite: ConferencePaper
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| Verlag: |
Verlag:
Physikalisch-Technische Bundesanstalt (PTB)
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| Erscheinungsjahr: |
Erscheinungsjahr:
2019
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| Rechte: |
Rechte:
Private use is allowed for non-profit purposes only.
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| Datumsangaben: |
Datumsangaben:
Verfügbar:
2019-04-08
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| Datei: |
Datei:
Datei herunterladen
(application/pdf)
1.2 MB
MD5 Prüfsumme: bc79458992c173e89154d9af86ad9a3d SHA256 Prüfsumme: 6a76c392dae600cb9d196ada573ac406c699ff462d53ace69a26e029dd23c0a5 
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| Stichwörter: |
Stichwörter:
calibration ;
transmission line measurements ;
standards ;
error correction ;
microwave measurement ;
frequency measurement ;
measurement uncertainty
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| Zusammenfassung: |
Zusammenfassung:
In this paper we compare the performance of a residual error correction algorithm against the performance of its predecessor and investigate its ability to second-order correct on-wafer calibrations which are widely used in industry. Independent of the calibration standard definition and the calibration method used, consistent results are obtained after applying the residual error correction.
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