| Title: |
Title:
On-wafer residual error correction through adaptive filtering of verification line measurements
|
| Authors: |
Authors:
Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und FelderSavin, Aleksandr, Tomsk State University of Control Systems and Radioelectronics, Tomsk, Russia |
| Contributors: |
Contributors:
HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
|
| Languages: |
Languages:
en
|
| DOI: |
DOI:
10.7795/EMPIR.14IND02.CA.20190403F
|
| Resource Type: |
Resource Type:
PTB: Conference Article,
DINI: ConferencePaper,
DataCite: ConferencePaper
|
| Publisher: |
Publisher:
Physikalisch-Technische Bundesanstalt (PTB)
|
| Rights: |
Rights:
Private use is allowed for non-profit purposes only.
|
| Dates: |
Dates:
Available:
2019-04-08
|
| File: |
File:
Download File
(application/pdf)
1.2 MB
MD5 Checksum: bc79458992c173e89154d9af86ad9a3d SHA256 Checksum: 6a76c392dae600cb9d196ada573ac406c699ff462d53ace69a26e029dd23c0a5 |
| Keywords: |
Keywords:
calibration ;
transmission line measurements ;
standards ;
error correction ;
microwave measurement ;
frequency measurement ;
measurement uncertainty
|
| Abstract: |
Abstract:
In this paper we compare the performance of a residual error correction algorithm against the performance of its predecessor and investigate its ability to second-order correct on-wafer calibrations which are widely used in industry. Independent of the calibration standard definition and the calibration method used, consistent results are obtained after applying the residual error correction.
|
-OAR
