| Titel: |
Titel:
On-wafer residual error correction through adaptive filtering of verification line measurements
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| Autoren: |
Autoren:
Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und FelderSavin, Aleksandr, Tomsk State University of Control Systems and Radioelectronics, Tomsk, Russia |
| Beitragende: |
Beitragende:
HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
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| Sprachen: |
Sprachen:
en
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| DOI: |
DOI:
10.7795/EMPIR.14IND02.CA.20190403F
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| Art der Ressource: |
Art der Ressource:
Text / Article
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| Verlag: |
Verlag:
Physikalisch-Technische Bundesanstalt (PTB)
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| Rechte: |
Rechte:
Private use is allowed for non-profit purposes only.
|
| Datumsangaben: |
Datumsangaben:
Verfügbar: 2019-04-08 |
| Datei: |
Datei:
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| Stichwörter: |
Stichwörter:
calibration ;
transmission line measurements ;
standards ;
error correction ;
microwave measurement ;
frequency measurement ;
measurement uncertainty
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| Zusammenfassung: |
Zusammenfassung:
In this paper we compare the performance of a residual error correction algorithm against the performance of its predecessor and investigate its ability to second-order correct on-wafer calibrations which are widely used in industry. Independent of the calibration standard definition and the calibration method used, consistent results are obtained after applying the residual error correction.
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-OAR
