Title: On-wafer residual error correction through adaptive filtering of verification line measurements
Authors: Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder
Savin, Aleksandr, Tomsk State University of Control Systems and Radioelectronics, Tomsk, Russia
Contributors: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Resource Type: Text / Article
Publisher: Physikalisch-Technische Bundesanstalt (PTB)
Rights: Private use is allowed for non-profit purposes only.
Dates: Available: 2019-04-08
File: Download File (application/pdf) 1.20 MB (1256668 Bytes)
MD5 Checksum: bc79458992c173e89154d9af86ad9a3d
SHA256 Checksum: 6a76c392dae600cb9d196ada573ac406c699ff462d53ace69a26e029dd23c0a5
Keywords: calibration ; transmission line measurements ; standards ; error correction ; microwave measurement ; frequency measurement ; measurement uncertainty
Abstract: In this paper we compare the performance of a residual error correction algorithm against the performance of its predecessor and investigate its ability to second-order correct on-wafer calibrations which are widely used in industry. Independent of the calibration standard definition and the calibration method used, consistent results are obtained after applying the residual error correction.