| Title: |
Title:
On the importance of calibration standards definitions for on-wafer measurements up to 110 GHz
|
| Authors: |
Authors:
Probst, Thorsten, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und FelderZinal, Sherko, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder Dörner, Ralf, Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik - FBH, Berlin, Germany Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder |
| Contributors: |
Contributors:
HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
|
| Languages: |
Languages:
en
|
| DOI: |
DOI:
10.7795/EMPIR.14IND02.CA.20190403C
|
| Resource Type: |
Resource Type:
PTB: Conference Article,
DINI: ConferencePaper,
DataCite: ConferencePaper
|
| Publisher: |
Publisher:
Physikalisch-Technische Bundesanstalt (PTB)
|
| Rights: |
Rights:
Private use is allowed for non-profit purposes only.
|
| Dates: |
Dates:
Available:
2019-04-08
|
| File: |
File:
Download File
(application/pdf)
404.3 KB
MD5 Checksum: 2bc1d60079dede763002070b2e93af18 SHA256 Checksum: 458330f39d7c3755edda494faf8593a02ca6e18201ce30fdcf8335b923317ff2 |
| Keywords: |
Keywords:
on-wafer ;
calibration ;
substrate ;
probes
|
| Abstract: |
Abstract:
This paper reports on the follow-up evaluation of an on-wafer measurement comparison on custom-made and conventional alumina calibration substrates in the frequency range up to 110GHz. The focus of the current investigation is on the performance of different calibration methods used for correcting device under test (DUT) measurements on the custommade substrate. Four different calibration schemes are discussed and the results of the calibration methods are presented and compared.
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-OAR
