Title: Establishing traceability for on-wafer S-parameter measurements of membrane technology devices up to 110 GHz
Authors: Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder
Zinal, Sherko, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder
Probst, Thorsten, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder
Hechtfischer, Gerd, Rohde & Schwarz GmbH & Co. KG, München, Germany
Schmückle, Franz-Josef, Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik, Berlin, Germany
Heinrich, Wolfgang, Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik, Berlin, Germany
Contributors: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Language:en
DOI:10.7795/EMPIR.14IND02.CA.20190403
Resource Type: Text / Article
Publisher: Physikalisch-Technische Bundesanstalt (PTB)
Rights: Private use is allowed for non-profit purposes only.
Dates: Available: 2019-04-08
File: Download File (application/pdf) 832.28 kB (852259 Bytes)
MD5 Checksum: d5c81c5de188bfd76b103f4d46b12659
SHA256 Checksum: 8603300b6ba2939933e094247adc58b90c24204b4fba8fb508300eefbd073c1c
Keywords: on-wafer ; calibration ; S-parameters ; traceability ; uncertainty budget
Abstract: In this paper we report on progress towards establishing traceability for fully calibrated on-wafer measurements of planar devices built in membrane technology. For the first time, we present a comprehensive uncertainty budget for on-wafer S-parameter measurements, including instrumentation errors, connector repeatability and calibration standard uncertainties. Preliminary results are shown for three typical devices.