| Title: |
Title:
Establishing traceability for on-wafer S-parameter measurements of membrane technology devices up to 110 GHz
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| Authors: |
Authors:
Arz, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und FelderZinal, Sherko, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder Probst, Thorsten, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 2.2, Hochfrequenz und Felder Hechtfischer, Gerd, Rohde & Schwarz GmbH & Co. KG, München, Germany Schmückle, Franz-Josef, Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik, Berlin, Germany Show all authors (6) |
| Contributors: |
Contributors:
HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
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| Languages: |
Languages:
en
|
| DOI: |
DOI:
10.7795/EMPIR.14IND02.CA.20190403
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| Resource Type: |
Resource Type:
PTB: Conference Article,
DINI: ConferencePaper,
DataCite: ConferencePaper
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| Publisher: |
Publisher:
Physikalisch-Technische Bundesanstalt (PTB)
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| Rights: |
Rights:
Private use is allowed for non-profit purposes only.
|
| Dates: |
Dates:
Available:
2019-04-08
|
| File: |
File:
Download File
(application/pdf)
832.3 KB
MD5 Checksum: d5c81c5de188bfd76b103f4d46b12659 SHA256 Checksum: 8603300b6ba2939933e094247adc58b90c24204b4fba8fb508300eefbd073c1c |
| Keywords: |
Keywords:
on-wafer ;
calibration ;
S-parameters ;
traceability ;
uncertainty budget
|
| Abstract: |
Abstract:
In this paper we report on progress towards establishing traceability for fully calibrated on-wafer measurements of planar devices built in membrane technology. For the first time, we present a comprehensive uncertainty budget for on-wafer S-parameter measurements, including instrumentation errors, connector repeatability and calibration standard uncertainties. Preliminary results are shown for three typical devices.
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-OAR
