| Titel: |
Titel:
Field of view effects on local slope measurements in confocal laser scanning microscopy for surface metrology
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| Autoren: |
Autoren:
Gao, Sai, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik, ORCID: 0009-0004-1465-9524Felgner, Andre, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik, ORCID: 0000-0002-7851-2220 Dziomba, Thorsten, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik |
| Beitragende: |
Beitragende:
HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
|
| Seiten: |
Seiten:
6
|
| Sprachen: |
Sprachen:
Englisch
|
| DOI: |
DOI:
10.7795/820.20260831C
|
| Art der Ressource: |
Art der Ressource:
PTB: Preprint,
DINI: Preprint,
DataCite: Preprint
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| Verlag: |
Verlag:
Physikalisch-Technische Bundesanstalt (PTB)
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| Erscheinungsjahr: |
Erscheinungsjahr:
2026
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| Quelle: |
Quelle:
Optics and Photonics for Advanced Dimensional Metrology IV
, Bd. 14084
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| Rechte: |
Rechte:
https://creativecommons.org/licenses/by/4.0/Creative Commons Attribution 4.0 International (CC BY 4.0) |
| Beziehungen: |
Beziehungen:
IsVariantFormOf: DOI
10.1117/12.3100375
|
| Datumsangaben: |
Datumsangaben:
Verfügbar:
2026-08-31
|
| Datei: |
Datei:
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MD5 Prüfsumme: ef65df6860c2da35af76f9ac27c53497 SHA256 Prüfsumme: 0a03145f2223c00f71fed089f1a56e7b728a5e91c26f4666ceb01a611158161a |
| Stichwörter: |
Stichwörter:
surface texture metrology ;
confocal laser scanning microscopy ;
field of view homogeneity ;
slope measurement capability
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| Zusammenfassung: |
Zusammenfassung:
Surface-dependent field-of-view (FOV) inhomogeneity in confocal laser scanning microscopy (CLSM) has been demonstrated but remains insufficiently quantified, particularly for surfaces with complex, multi-scale geometries. This limitation affects the traceability and comparability of optical surface topography measurements. In this work, we show that FOV-induced measurement deviations are fundamentally surface-dependent and cannot be explained by local slope alone. Using deterministic and stochastic surfaces with controlled slope distributions and spatial frequency content, we demonstrate that smooth geometries exhibit negligible FOV effects, whereas complex high-frequency surfaces exhibit pronounced position-dependent distortions. To interpret this phenomenon, a surface-complexity-driven framework is introduced, linking the angular transfer characteristics of the instrument to the surface slope distribution via a complexity parameter î. By relating î to gradient magnitude distribution descriptors (e.g., Sdq95) and spatial frequency characteristics (e.g., Sal), the framework provides a physically grounded interpretation of FOV-dependent measurement limits. The results indicate that, for complex surfaces, CLSM measurements become increasingly instrument-limited rather than surface-limited, due to position-dependent loss of high-angle information. The observed FOV effects are consistent with scanning-induced angular limitations, including pupil shift and/or clipping, and off-axis aberrations. This work establishes a foundation for task-specific, traceable optical metrology of complex surfaces.
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Autoren
Gao, Sai, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik, ORCID: 0009-0004-1465-9524
Felgner, Andre, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik, ORCID: 0000-0002-7851-2220
Dziomba, Thorsten, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik
Felgner, Andre, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik, ORCID: 0000-0002-7851-2220
Dziomba, Thorsten, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik