| Titel: | Rigorous modeling of a confocal microscope |
| Autoren: |
Wyss, Silvana, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik Krüger, Jan, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 4.2, Bild- und Wellenoptik Grundmann, Jana, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 4.2, Bild- und Wellenoptik Bodermann, Bernd, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 4.2, Bild- und Wellenoptik Gao, Sai, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik Alle Autoren anzeigen (9) |
| Beitragende: | HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887 |
| Seiten: | 9 |
| Sprache: | en |
| DOI: | 10.7795/810.20240502 |
| Art der Ressource: | Text / Conference Article |
| Herausgeber: | Physikalisch-Technische Bundesanstalt (PTB) |
| Rechte: | Download for personal/private use only, if your national copyright law allows this kind of use. |
| Beziehungen: | IsIdenticalTo: DOI 10.1117/12.2673784 |
| Daten: |
Verfügbar: 2024-05-28 Erstellt: 2023-08-10 |
| Datei: |
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| Schlagworte | confocal microscope ; BEM ; FEM ; FDTD ; image formation |
| Zusammenfassung: | A reliable tool for simulations of confocal microscopes shall be developed to enable improved model-based dimensional metrology. To simulate measurements on rough surfaces the boundary element method (BEM) simulation tool SpeckleSim, developed by the ITO of the University of Stuttgart, is combined with a Fourier optics based image formation. SpeckleSim, which calculates the light-structure interaction by solving the Maxwell equations, is compared with the well-known FEM based solver JCMsuite and the FDTD based solver Ansys Lumerical. As an example, a rectangular shaped line is used as an object. Due to different boundary conditions the results show as expected small deviations, which require further investigations. First comparison results and the general concept of the image formation method will be presented. |
| Förderung: | European Commission (EC), ISNI: 0000 0001 2162 673X, Grant Title: Traceable industrial 3D roughness and dimensional measurement using optical 3D microscopy and optical distance sensors, Grant Number: EMPIR 20IND07 |