Title: Rigorous modeling of a confocal microscope
Authors: Wyss, Silvana, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik
Krüger, Jan, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 4.2, Bild- und Wellenoptik
Grundmann, Jana, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 4.2, Bild- und Wellenoptik
Bodermann, Bernd, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 4.2, Bild- und Wellenoptik
Gao, Sai, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik

Show all authors (9)
Contributors: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Pages:9
Language:en
DOI:10.7795/810.20240502
Resource Type: Text / Conference Article
Publisher: Physikalisch-Technische Bundesanstalt (PTB)
Rights: Download for personal/private use only, if your national copyright law allows this kind of use.
Relationships: IsIdenticalTo: DOI 10.1117/12.2673784
Dates: Available: 2024-05-28
Created: 2023-08-10
File: Download File (application/pdf) 1.08 MB (1137177 Bytes)
MD5 Checksum: a8cc389a5a0ff9604178af7422c81f91
SHA256 Checksum: 2fa41a53eb356a58079eef29cbdd1df0ccd6adcbefeb7897b8a64fc584a6c5a4
Keywords confocal microscope ; BEM ; FEM ; FDTD ; image formation
Abstract: A reliable tool for simulations of confocal microscopes shall be developed to enable improved model-based dimensional metrology. To simulate measurements on rough surfaces the boundary element method (BEM) simulation tool SpeckleSim, developed by the ITO of the University of Stuttgart, is combined with a Fourier optics based image formation. SpeckleSim, which calculates the light-structure interaction by solving the Maxwell equations, is compared with the well-known FEM based solver JCMsuite and the FDTD based solver Ansys Lumerical. As an example, a rectangular shaped line is used as an object. Due to different boundary conditions the results show as expected small deviations, which require further investigations. First comparison results and the general concept of the image formation method will be presented.
Funding: European Commission (EC), ISNI: 0000 0001 2162 673X, Grant Title: Traceable industrial 3D roughness and dimensional measurement using optical 3D microscopy and optical distance sensors, Grant Number: EMPIR 20IND07