Title: Integration of a step gauge measurement capability at the PTB Nanometer Comparator – concept and preliminary tests
Authors: Weichert, Christoph, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.2, Dimensionelle Nanometrologie
Bütefisch, Sebastian, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.2, Dimensionelle Nanometrologie
Köning, Rainer, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.2, Dimensionelle Nanometrologie
Flügge, Jens, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.2, Dimensionelle Nanometrologie
Contributors: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Pages:10
Language:en
DOI:10.7795/810.20180323G
Resource Type: Text / Article
Publisher: Physikalisch-Technische Bundesanstalt (PTB)
Rights: https://creativecommons.org/licenses/by/4.0/
CC BY 4.0
Dates: Available: 2018-03-28
Created: 2017-12-22
File: Download File (application/pdf) 872.69 kB (893634 Bytes)
MD5 Checksum: 9dffdaa0da365721c4fd10180bb57e91
SHA256 Checksum: 52c9ab3613ead1693402e5c9b600ce3408892d7a43fed44494fb65a742d3ba2f
Keywords tactile measurement ; step gauge ; fibre interferometer
Abstract: To meet the increasing uncertainty demands for the calibration of tactile coordinate measuring machines the PTB aims to provide calibrated artefacts with an uncertainty in the range of 30 nm. Therefore, the Nanometer Comparator will be upgraded with a tactile sensor system to add the capability to measure step gauges. A concept of the integration of a tactile sensor into the machine setup is presented and two different sensors were analysed by repetitively contacting a gauge block face. With a sensor based on a silicon flexure and two fibre interferometers a (1) repeatability of less than 7 nm was achieved.
Other: This article is based on a presentation at the conference "MacroScale 2017 - Recent developments in traceable dimensional measurements", VTT MIKES Espoo, (Finnland), 17th-19th October 2017.