Titel: Integration of a step gauge measurement capability at the PTB Nanometer Comparator – concept and preliminary tests
Autoren: Weichert, Christoph, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.2, Dimensionelle Nanometrologie
Bütefisch, Sebastian, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.2, Dimensionelle Nanometrologie
Köning, Rainer, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.2, Dimensionelle Nanometrologie
Flügge, Jens, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.2, Dimensionelle Nanometrologie
Beitragende: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Seiten:10
Sprache:en
DOI:10.7795/810.20180323G
Art der Ressource: Text / Article
Herausgeber: Physikalisch-Technische Bundesanstalt (PTB)
Rechte: https://creativecommons.org/licenses/by/4.0/
CC BY 4.0
Daten: Verfügbar: 2018-03-28
Erstellt: 2017-12-22
Datei: Datei herunterladen (application/pdf) 872.69 kB (893634 Bytes)
MD5 Prüfsumme: 9dffdaa0da365721c4fd10180bb57e91
SHA256 Prüfsumme: 52c9ab3613ead1693402e5c9b600ce3408892d7a43fed44494fb65a742d3ba2f
Schlagworte tactile measurement ; step gauge ; fibre interferometer
Zusammenfassung: To meet the increasing uncertainty demands for the calibration of tactile coordinate measuring machines the PTB aims to provide calibrated artefacts with an uncertainty in the range of 30 nm. Therefore, the Nanometer Comparator will be upgraded with a tactile sensor system to add the capability to measure step gauges. A concept of the integration of a tactile sensor into the machine setup is presented and two different sensors were analysed by repetitively contacting a gauge block face. With a sensor based on a silicon flexure and two fibre interferometers a (1) repeatability of less than 7 nm was achieved.
Anderes: This article is based on a presentation at the conference "MacroScale 2017 - Recent developments in traceable dimensional measurements", VTT MIKES Espoo, (Finnland), 17th-19th October 2017.