Title: Recent Developments in Angle Metrology
Authors: Yandayan, Tanfer, TÜBİTAK UME, Gebze/Kocaeli, Turkey, ORCID: 0000-0002-8843-4692
Geckeler, Ralf D., Physikalisch-Technische Bundesanstalt, Braunschweig, Germany, ISNI: 0000 0000 1227 9038
Pisani, Marco, Istituto Nazionale di Ricerca Metrologica (INRIM), Torino, Italy, ORCID: 0000-0001-6233-5429
Prieto, Emilio, Centro Espanol de Metrologia (CEM), Madrid, Spain, ORCID: 0000-0001-5957-5501
Siewert, Frank, Helmholtz Zentrum Berlin (HZB), Institut für Nanometer Optik und Technologie, Berlin, Germany
Contributors: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Pages:13
Language:en
DOI:10.7795/810.20150325F
Resource Type: Text / Article
Publisher: Physikalisch-Technische Bundesanstalt (PTB)
Dates: Available: 2015-03-26
Classifications: OCIS 120-0120 ; OCIS 120-3930 ; OCIS 120-3940 ; OCIS 120-4640 ; OCIS 340-6720 ; OCIS 340-0340 ; OCIS 340-7470
File: Download File (application/pdf) 869.48 kB (890352 Bytes)
MD5 Checksum: a000b2e0565e034b6d6f3dc62ed6303b
SHA256 Checksum: 4cbc5dd60494838911a100c8ac54acbe4a067b591abcc252ecaac9fd22fc7278
Keywords: angle metrology ; autocollimators ; SI unit radian ; profilometers ; X-Ray and EUV Optics
Abstract: An overview of the current status of the state of art in angle metrology is provided by giving update information on the Joint Research Project (JRP) SIB58 'Angles' of the European Metrology Research Programme (EMRP). Current and future challenges to angle metrology are described presenting the requirements on the quality control of ultra-precise X-ray optical components for application in the Synchrotron Radiation (SR). Investigations performed on autocollimators for the first time under extremely challenging measuring conditions (performance with variable path lengths, with two axis operation, at small apertures, on curved surfaces, with aperture positioning relative to autocollimator axis), development of novel methods for determination of error sources in angle encoders and small angle generators to provide traceability with expanded uncertainties of less than 0.01" (50 nrad) are reported with the first results in addition to the highlights from the work carried out in the JRP.
Other: This article is based on a presentation at the conference "MacroScale 2014 - Recent developments in traceable dimensional measurements", Vienna (Austria), 28th-30th October 2014.
Citation: YANDAYAN, Tanfer, Ralf D. GECKELER, Marco PISANI, Emilio PRIETO and Frank SIEWERT. Recent Developments in Angle Metrology. Physikalisch-Technische Bundesanstalt (PTB), 2015. doi: 10.7795/810.20150325F
Remark: This article is based on a presentation at the conference "MacroScale 2014 - Recent developments in traceable dimensional measurements", Vienna (Austria), 28th-30th October 2014.