Titel: The INRIM 1D comparator with a new interferometric set-up for measurement of diameter gauges and linear artefacts
Autoren: Picotto, Gian Bartolo
Belotti, Roberto
Pometto, Marco
Santiano, Marco
Beitragende: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Seiten:4
Sprache:en
DOI:10.7795/810.20130620O
Art der Ressource: Text / Report
Herausgeber: Physikalisch-Technische Bundesanstalt (PTB)
Daten: Verfügbar: 2013
Veröffentlicht: 2013-07
Datei: Datei herunterladen (application/pdf) 188.51 kB (193035 Bytes)
MD5 Prüfsumme: f2e7b4ead43ba19dbc1191b21bb91df1
SHA256 Prüfsumme: 81a76aace2c6066b12352cf39e97a906608e3f95870d1cfeea44ab7a03967b64
Zusammenfassung: The INRIM 1D comparator was updated with a new interferometric set-up providing differential measurements of probe–sample displacements along the x-axis. In the proposed design, the measuring and reference beam paths fulfil the Abbe condition both in lateral and vertical alignment when probing the middle height section of the measuring gauge. Compensation of mechanical and thermal drifts was extended by using a symmetric and differential design of the optic paths. Significant improvements of the repeatability between series were demonstrated by internal comparisons with reference artefacts.
Anderes: article based on oral presentation at the conference MacroScale 2011 "Recent developments in traceable dimensional measurements",
Bern-Wabern (Switzerland), 04-06, October, 2011
Zitierform: PICOTTO, Gian Bartolo, Roberto BELLOTTI, Marco POMETTO, and Marco SANTIANO. The INRIM 1D comparator with a new interferometric set-up for measurement of diameter gauges and linear artefacts. Physikalisch-Technische Bundesanstalt (PTB), 2013. doi: 10.7795/810.20130620o
Bemerkung: article based on oral presentation at the conference MacroScale 2011 "Recent developments in traceable dimensional measurements", Bern-Wabern (Switzerland), 04-06, October, 2011