Titel: Scanning phase shift interferometry in length measurement
Autoren: Bartl, Guido
Schödel, Renè, ISNI: 0000 0000 1237 158X
Beitragende: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Seiten:6
Sprache:en
DOI:10.7795/810.20130620G
Art der Ressource: Text / Report
Herausgeber: Physikalisch-Technische Bundesanstalt (PTB)
Daten: Verfügbar: 2013
Veröffentlicht: 2013-08
Klassifikationen: OCIS 3175 interferometric imaging ; OCIS 5070 phase retrieval ; OCIS 5050 phase measurement ; OCIS 2650 fringe analysis ; OCIS 3180 interferometry ; OCIS 3940 metrology ; PACS 42.25.Hz interference, optical ; PACS 42.87.Bg phase-shifting ; PACS 06.30.Bp length measurement ; PACS 06.20.-f metrology
Datei: Datei herunterladen (application/pdf) 655.57 kB (671301 Bytes)
MD5 Prüfsumme: 7331b38d14a03d3595a2aafd9c704c08
SHA256 Prüfsumme: 7475d95b68704c55dee2cb2c87bdc7ac63cec71f049d50cb8d556b9dbd3c7ff2
Schlagworte: interferometry ; length measurement ; phase retrieval ; phase stepping ; scanning phase shift
Zusammenfassung: The Ultra-Precision Interferometer of PTB has been equipped with an external measuring path which can be cooled down to 10 K by a pulse tube cooler. Due to the cooling measures vibration is provoked in the interferometer system. Moreover, since the cooled part of the interferometer is a separate extension to the stabilized vacuum chamber, temperature changes can lead to a drift of the length of the beam path. Most phase stepping algorithms in length measurements by interferometry require fixed and well-known phase steps between the recorded interferograms. Hence, in the presence of unstable conditions in the environment of the experiment phase shifting interferometry cannot be performed as usual. Therefore, we have adapted the so-called scanning phase shift technique for the application in interferometric length measurements.
Anderes: article based on oral presentation at the conference MacroScale 2011 "Recent developments in traceable dimensional measurements", Bern-Wabern (Switzerland), 04-06, October, 2011
Zitierform: BARTL, Guido and René SCHÖDEL. Scanning phase shift interferometry in length measurement. Physikalisch-Technische Bundesanstalt (PTB), 2013. doi: 10.7795/810.20130620g
Bemerkung: article based on oral presentation at the conference MacroScale 2011 "Recent developments in traceable dimensional measurements", Bern-Wabern (Switzerland), 04-06, October, 2011