| Titel: |
Titel:
Calibration of photomasks for optical coordinate metrology
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| Autoren: |
Autoren:
Meli, Felix, Federal Office of Metrology METAS, Laboratory for Nano- and Microtechnology, Bern-Wabern, Switzerland
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| Beitragende: |
Beitragende:
HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
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| Seiten: |
Seiten:
12
|
| Sprachen: |
Sprachen:
en
|
| DOI: |
DOI:
10.7795/810.20130620C
|
| Art der Ressource: |
Art der Ressource:
Text / Report
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| Verlag: |
Verlag:
Physikalisch-Technische Bundesanstalt (PTB)
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| Datumsangaben: |
Datumsangaben:
Verfügbar:
2013
Herausgegeben: 2013-08 |
| Datei: |
Datei:
Datei herunterladen
(application/pdf)
1.9 MB
MD5 Prüfsumme: ac195fd3cbf9b8d2e8c730a5aad6056c SHA256 Prüfsumme: a410bc25547e9fe356a75701bff44a5ad9b94362101888c7b9285838d17fe19e |
| Stichwörter: |
Stichwörter:
photomask ;
optical coordinate metrology ;
ISO 10360-7 ;
test circle ;
roundness
|
| Zusammenfassung: |
Zusammenfassung:
Optical coordinate measuring machines (CMMs) are widely used in industrial production for fast measurements on complex components. According to ISO 10360-7 the calibration and verification of
these CMMs requires certified line scales or grid plates. Additionally, for the determination of the probing error of the imaging probe, masks with form calibrated test circles are compulsory. Using the photomask measuring instrument developed at METAS and using new specific procedures, it is possible to calibrate not only structure positions but also the diameter and roundness of circular structures with competitive uncertainties. |
| Anderes: |
Anderes:
article based on oral presentation at the conference MacroScale 2011 "Recent developments in traceable dimensional measurements", Bern-Wabern (Switzerland), 04-06, October, 2011 |
| Zitat: |
Zitat:
MELI, Felix. Calibration of photomasks for optical coordinate metrology. Physikalisch-Technische Bundesanstalt (PTB), 2013. doi: 10.7795/810.20130620C
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| Bemerkung: |
Bemerkung:
article based on oral presentation at the conference MacroScale 2011 "Recent developments in traceable dimensional measurements", Bern-Wabern (Switzerland), 04-06, October, 2011
|
-OAR
