Title: Dataset for the publication "Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements"
Authors: Xu, Min, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1 Oberflächenmesstechnik, ORCID: 0000-0002-5115-5737
Zhou, Ziqi, Technische Universität Braunschweig, Schleinitzstraße 20, 38106 Braunschweig, Germany, Institute of Production Measurement Technology (IPROM), ORCID: 0000-0002-1698-6260
Ahbe, Thomas, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1 Oberflächenmesstechnik
Peiner, Erwin, Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, Germany, Institute of Semiconductor Technology (IHT), ORCID: 0000-0001-5801-813X
Brand, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik, ORCID: 0000-0002-4293-4982
Contributors: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Language:en
DOI:10.7795/720.20220314
Resource Type: Dataset / Measurement Data
Publisher: Physikalisch-Technische Bundesanstalt (PTB)
Rights: https://creativecommons.org/licenses/by/4.0/
CC-BY 4.0 International
Relationships: References: DOI https://doi.org/10.3390/s22031298
Dates: Available: 2022-03-14
Classifications: INSPEC B70 Instrumentation and special applications
File: Download File (application/zip) 79.08 kB (80980 Bytes)
MD5 Checksum: da7da5bd8110c39496596776407931c7
SHA256 Checksum: b588b2925cff1f0afc3d04ada001da9ff21c8547c1624b2ae7b5611a892ef1ec
Keywords: surface topography measurement ; roughness measurement ; piezoresistive devices ; microprobe ; silicone fracture ; tip characterization ; fracture mechanics ; surface cracks
Abstract: Given their superior dynamics, microprobes represent promising probe candidates for high-speed roughness measurement applications. Their disadvantage, however, lies in the fact that the volume of the microprobe’s silicon tip decreases dramatically during roughness measurement, and the unstable tip geometry leads to an increase in measurement uncertainty. To investigate the factors that influence tip geometry variation during roughness measurement, a rectangular-shaped tip characterizer was employed to characterize the tip geometry, and a method for reconstructing the tip geometry from the measured profile was introduced. Experiments were conducted to explore the ways in which the tip geometry is influenced by tip wear, probing force, and the relative movement of the tip with respect to the sample. The results indicate that tip fracture and not tip wear is the main reason for tip volume loss, and that the lateral dynamic load on the tip during scanning mode is responsible for more tip fracture than are other factors.
Other: The results in this paper come from EMPIR 17IND05 MicroProbes, an EU-funded project. MicroProbes has received funding from the EMPIR program co-financed by the EU participating states and from the European Union’s Horizon 2020 research and innovation program.
Remark: Description of the individual files

Each data file within this dataset is related to one figure of the related publication:
Xu et al. Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements. Sensors 2022, 22, 1298. https://doi.org/10.3390/s22031298

The data are named according to (figure No.)_(experimental conditions).txt. For example:
Fig9_260m.txt
| |_data of the curve corresponding to a sliding length of 260m
|_______for Fig.9

The curves in Figures 9, 10 and 12 describe the characterized tip profile as a function of the horizontal position of the tip.
The curve in Figure 11 describes the volume loss as a function of the sliding distance.

Files with the extension .txt are space-separated tabular data which can be opened with any text editor.
Funding: European Commission (EC), ISNI: 0000 0001 2162 673X, Grant Title: Multifunctional ultrafast microprobes for on-the-machine measurements, Grant Number: EMPIR 17IND05 MicroProbes