Titel: | Dataset for the publication "Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements" |
Autoren: |
Behle, Heinrich, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik Brand, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik, ORCID: 0000-0002-4293-4982 |
Beitragende: | HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887 |
Sprache: | en |
DOI: | 10.7795/710.20211125 |
Art der Ressource: | Dataset / Simulation Data |
Herausgeber: | Physikalisch-Technische Bundesanstalt (PTB) |
Rechte: |
https://creativecommons.org/licenses/by/4.0/ CC-BY 4.0 International |
Beziehungen: | IsReferencedBy: DOI 10.5162/SMSI2020/P2.7 |
Daten: |
Verfügbar: 2021-11-30 |
Klassifikationen: | INSPEC B7000 Instrumentation and special applications ; INSPEC B7200 Measurement equipment and instrumentation systems ; INSPEC E2000 Engineering mechanics ; INSPEC E1520 Manufacturing processes ; INSPEC E1700 Manufacturing resources and products |
Datei: |
Datei herunterladen
(application/zip)
2.94 kB (3014 Bytes)
MD5 Prüfsumme: 0711764fdeb96727f87499186dad6757 SHA256 Prüfsumme: a222e6876408e84f9b9236721608e6a71afb814c88a126e264ad650c8adb2b4a |
Schlagworte | finite element analysis ; frequency domain mode analysis ; bending ; mechanical oscillations ; diamond ; piezoresistive devices ; silicon ; cantilevers ; surface roughness ; surface morphology |
Anderes: | EMPIR projects are co-funded by the European Union’s (EU) Horizon 2020 research and innovation programme and the EMPIR participating states. |
Bemerkung: | All data files within this dataset are related to Fig.3 and Fig.4 of the related publication: Behle et al. Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements. SMSI 2020 Conference – Sensor and Measurement Science International. https://DOI 10.5162/SMSI2020/P2.7 Files with the extension XLSX can be opened with a spreadsheet Excel. Files with the extension TXT are space-separated tabular data which can be opened with any text editor. |
Förderung: | European Commission (EC), ISNI: 0000 0001 2162 673X, Grant Title: Multifunctional ultrafast microprobes for on-the-machine measurements, Grant Number: EMPIR 17IND05 MicroProbes |