| Titel: |
Titel:
Dataset for the publication "Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements"
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| Autoren: |
Autoren:
Behle, Heinrich, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, OberflächenmesstechnikBrand, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik, ORCID: 0000-0002-4293-4982 |
| Beitragende: |
Beitragende:
HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
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| Sprachen: |
Sprachen:
en
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| DOI: |
DOI:
10.7795/710.20211125
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| Art der Ressource: |
Art der Ressource:
Dataset / Simulation Data
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| Verlag: |
Verlag:
Physikalisch-Technische Bundesanstalt (PTB)
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| Rechte: |
Rechte:
https://creativecommons.org/licenses/by/4.0/CC-BY 4.0 International |
| Beziehungen: |
Beziehungen:
IsReferencedBy: DOI 10.5162/SMSI2020/P2.7
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| Datumsangaben: |
Datumsangaben:
Verfügbar: 2021-11-30 |
| Klassifikationen: |
Klassifikationen:
INSPEC B7000 Instrumentation and special applications ; INSPEC B7200 Measurement equipment and instrumentation systems ; INSPEC E2000 Engineering mechanics ; INSPEC E1520 Manufacturing processes ; INSPEC E1700 Manufacturing resources and products
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| Datei: |
Datei:
Datei herunterladen
(application/zip)
2.94 kB (3014 Bytes)
MD5 Prüfsumme: 0711764fdeb96727f87499186dad6757 SHA256 Prüfsumme: a222e6876408e84f9b9236721608e6a71afb814c88a126e264ad650c8adb2b4a |
| Stichwörter: |
Stichwörter:
finite element analysis ;
frequency domain mode analysis ;
bending ;
mechanical oscillations ;
diamond ;
piezoresistive devices ;
silicon ;
cantilevers ;
surface roughness ;
surface morphology
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| Anderes: |
Anderes:
EMPIR projects are co-funded by the European Union’s (EU) Horizon 2020 research and innovation programme and the EMPIR participating states.
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| Bemerkung: |
Bemerkung:
All data files within this dataset are related to Fig.3 and Fig.4 of the related publication:Behle et al. Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements. SMSI 2020 Conference – Sensor and Measurement Science International. https://DOI 10.5162/SMSI2020/P2.7 Files with the extension XLSX can be opened with a spreadsheet Excel. Files with the extension TXT are space-separated tabular data which can be opened with any text editor. |
| Förderung: |
Förderung:
European Commission (EC), ISNI: 0000 0001 2162 673X, Grant Title: Multifunctional ultrafast microprobes for on-the-machine measurements, Grant Number: EMPIR 17IND05 MicroProbes
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-OAR
