Title: Dataset for the publication "Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements"
Authors: Behle, Heinrich, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik
Brand, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik, ORCID: 0000-0002-4293-4982
Contributors: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Resource Type: Dataset / Simulation Data
Publisher: Physikalisch-Technische Bundesanstalt (PTB)
Rights: https://creativecommons.org/licenses/by/4.0/
CC-BY 4.0 International
Relationships: IsReferencedBy: DOI 10.5162/SMSI2020/P2.7
Dates: Available: 2021-11-30
Classifications: INSPEC B7000 Instrumentation and special applications ; INSPEC B7200 Measurement equipment and instrumentation systems ; INSPEC E2000 Engineering mechanics ; INSPEC E1520 Manufacturing processes ; INSPEC E1700 Manufacturing resources and products
File: Download File (application/zip) 2.94 kB (3014 Bytes)
MD5 Checksum: 0711764fdeb96727f87499186dad6757
SHA256 Checksum: a222e6876408e84f9b9236721608e6a71afb814c88a126e264ad650c8adb2b4a
Keywords finite element analysis ; frequency domain mode analysis ; bending ; mechanical oscillations ; diamond ; piezoresistive devices ; silicon ; cantilevers ; surface roughness ; surface morphology
Other: EMPIR projects are co-funded by the European Union’s (EU) Horizon 2020 research and innovation programme and the EMPIR participating states.
Remark: All data files within this dataset are related to Fig.3 and Fig.4 of the related publication:
Behle et al. Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements. SMSI 2020 Conference – Sensor and Measurement Science International. https://DOI 10.5162/SMSI2020/P2.7

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Funding: European Commission (EC), ISNI: 0000 0001 2162 673X, Grant Title: Multifunctional ultrafast microprobes for on-the-machine measurements, Grant Number: EMPIR 17IND05 MicroProbes