Title:
Title:
Dataset for the publication "Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements"
Authors:
Authors:
Behle, Heinrich, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik
Brand, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik, ORCID: 0000-0002-4293-4982
Contributors:
Contributors:
HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Languages:
Languages:
en
DOI:
DOI:
10.7795/710.20211125
Resource Type:
Resource Type:
Dataset / Simulation Data
Publisher:
Publisher:
Physikalisch-Technische Bundesanstalt (PTB)
Rights:
Rights:
https://creativecommons.org/licenses/by/4.0/
CC-BY 4.0 International
Relationships:
Relationships:
IsReferencedBy: DOI 10.5162/SMSI2020/P2.7
Dates:
Dates:
Available: 2021-11-30
Classifications:
Classifications:
INSPEC B7000 Instrumentation and special applications ; INSPEC B7200 Measurement equipment and instrumentation systems ; INSPEC E2000 Engineering mechanics ; INSPEC E1520 Manufacturing processes ; INSPEC E1700 Manufacturing resources and products
File:
File:
Download File (application/zip) 2.94 kB (3014 Bytes)
MD5 Checksum: 0711764fdeb96727f87499186dad6757
SHA256 Checksum: a222e6876408e84f9b9236721608e6a71afb814c88a126e264ad650c8adb2b4a
Keywords:
Keywords:
finite element analysis ; frequency domain mode analysis ; bending ; mechanical oscillations ; diamond ; piezoresistive devices ; silicon ; cantilevers ; surface roughness ; surface morphology
Other:
Other:
EMPIR projects are co-funded by the European Union’s (EU) Horizon 2020 research and innovation programme and the EMPIR participating states.
Remark:
Remark:
All data files within this dataset are related to Fig.3 and Fig.4 of the related publication:
Behle et al. Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements. SMSI 2020 Conference – Sensor and Measurement Science International. https://DOI 10.5162/SMSI2020/P2.7

Files with the extension XLSX can be opened with a spreadsheet Excel. Files with the extension TXT are space-separated tabular data which can be opened with any text editor.
Funding:
Funding:
European Commission (EC), ISNI: 0000 0001 2162 673X, Grant Title: Multifunctional ultrafast microprobes for on-the-machine measurements, Grant Number: EMPIR 17IND05 MicroProbes

Authors

Behle, Heinrich, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik
Brand, Uwe, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 5.1, Oberflächenmesstechnik, ORCID: 0000-0002-4293-4982

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