| Titel: | Measurement and simulation data for "Optical form measurement employing a tiltable line scanning low coherence interferometer for annular subaperture stitching interferometry" |
| Autoren: |
Schake, Markus, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 4.2, Bild- und Wellenoptik, ORCID: 0000-0002-9883-3494 Riebeling, Jörg, Universität Kassel, Kassel, ORCID: 0000-0002-5997-8527 Lehmann, Peter, Universität Kassel, Kassel, ORCID: 0000-0003-0051-5066 Ehret, Gerd, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 4.2, Bild- und Wellenoptik, ORCID: 0000-0001-8432-4739 |
| Beitragende: | HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887 |
| Sprache: | en |
| DOI: | 10.7795/710.20210414 |
| Art der Ressource: | Dataset / Simulation Data |
| Herausgeber: | Physikalisch-Technische Bundesanstalt (PTB) |
| Rechte: |
https://creativecommons.org/licenses/by/4.0/ CC-BY 4.0 International |
| Daten: |
Verfügbar: 2021-04-14 |
| Klassifikationen: | OCIS 120.3180 Interferometry ; OCIS 230.1150 All-optical devices ; OCIS 240.0240 Optics at surfaces |
| Datei: |
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| Schlagworte | optical interferometry ; stitching interferometry ; surface topography measurement ; aspherical optics ; form measurement ; measurement uncertainty |
| Zusammenfassung: | The provided data set and simulation software enables the immediate replication of the results presented in "Optical form measurement employing a tiltable line scanning low coherence interferometer for annular subaperture stitching interferometry." The research data are structured with respect to the figures presented in the contribution. Each subfolder contains all necessary measurement or simulation data to receive the figure from the contribution by running a MATLAB file. Therefore, it is possible to compare the results with full context to those presented in the contribution. The simulations demonstrate the transition of radial displacement uncertainties in an annular subaperture stitching interferometer through surface stitching algorithms to the topography result. The comparison of the simulation and measurement results indicates, that the radial displacement errors are the dominant source of topography deviations. By modelling of the radial displacement errors an estimate of the expanded uncertainty of the surface form measurement may be received. |
| Anderes: | description of the individual files: Each folder refers to a figure or a table in the related article: Figs. 2-5 contain simulation results Figs. 6-7 contain measurement results Figs. 8-11 contain comparisons of measurement and simulation results Each folder contains a "HOWTO.txt" file with instructions how to generate the graphical output of the measurement or simulation data. Additional instructions in the "HOWTO.txt" files explain how to repeat the virtual experiments. recommended software to open the data: MATLAB R2016b, Python (https://docs.scipy.org/doc/scipy/reference/generated/scipy.io.loadmat.html) -The simulation and data evaluation files are *.m files and require MATLAB to be executed. However, they may be opened in a text editor to view the code. -The measurement and simulation data are stored as compressed multidimensional structures in *.mat files. These may be opened with MATLAB, but may also be converted with the named Python script into ASCII-based data formats like *.h5. |
| Förderung: | Deutsche Forschungsgemeinschaft (DFG), ISNI: 0000 0001 2096 9829, Grant Title: Formmessung an Präzisionsbauteilen mit einem dynamisch nachgeführten interferometrischen Zeilensensor, Grant Number: LE 992/7-3, EH 400/4-3, Projectnumber: 209933375 |