Title: Measurement and simulation data for "Optical form measurement employing a tiltable line scanning low coherence interferometer for annular subaperture stitching interferometry"
Authors: Schake, Markus, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 4.2, Bild- und Wellenoptik, ORCID: 0000-0002-9883-3494
Riebeling, Jörg, Universität Kassel, Kassel, ORCID: 0000-0002-5997-8527
Lehmann, Peter, Universität Kassel, Kassel, ORCID: 0000-0003-0051-5066
Ehret, Gerd, Physikalisch-Technische Bundesanstalt (PTB), Fachbereich 4.2, Bild- und Wellenoptik, ORCID: 0000-0001-8432-4739
Contributors: HostingInstitution: Physikalisch-Technische Bundesanstalt (PTB), ISNI: 0000 0001 2186 1887
Language:en
DOI:10.7795/710.20210414
Resource Type: Dataset / Simulation Data
Publisher: Physikalisch-Technische Bundesanstalt (PTB)
Rights: https://creativecommons.org/licenses/by/4.0/
CC-BY 4.0 International
Dates: Available: 2021-04-14
Classifications: OCIS 120.3180 Interferometry ; OCIS 230.1150 All-optical devices ; OCIS 240.0240 Optics at surfaces
File: Download File (application/zip) 9.47 GB (10172164338 Bytes)
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Keywords: optical interferometry ; stitching interferometry ; surface topography measurement ; aspherical optics ; form measurement ; measurement uncertainty
Abstract: The provided data set and simulation software enables the immediate replication of the results presented in
"Optical form measurement employing a tiltable line scanning low coherence interferometer for annular subaperture stitching interferometry."
The research data is structured with respect to the figures presented in the contribution. Each subfolder contains all necessary measurement or simulation data to receive the figure from the contribution by running a MATLAB file. Therefore, it is possible to compare the results with full context to those presented in the contribution.
The simulations demonstrate the transition of radial displacement uncertainties in an annular subaperture stitching interferometer through surface stitching algorithms to the topography result. The comparison of the simulation and measurement results indicates, that the radial displacement errors are the dominant source of topography deviations. By modelling of the radial displacement errors an estimate of the expanded uncertainty of the surface form measurement may be received.
Other: description of the individual files:
Each folder refers to a figure or a table in the related article:
Figs. 2-5 contain simulation results
Figs. 6-7 contain measurement results
Figs. 8-11 contain comparisons of measurement and simulation results
Each folder contains a "HOWTO.txt" file with instructions how to generate the graphical output of the measurement or simulation data.
Additional instructions in the "HOWTO.txt" files explain how to repeat the virtual experiments.

recommended software to open the data:
MATLAB R2016b, Python (https://docs.scipy.org/doc/scipy/reference/generated/scipy.io.loadmat.html)
-The simulation and data evaluation files are *.m files and require MATLAB to be executed. However, they may be opened in a text editor to view the code.
-The measurement and simulation data are stored as compressed multidimensional structures in *.mat files. These may be opened with MATLAB, but may also be converted with the named Python script into ASCII-based data formats like *.h5.
Funding: Deutsche Forschungsgemeinschaft (DFG), ISNI: 0000 0001 2096 9829, Grant Title: Formmessung an Präzisionsbauteilen mit einem dynamisch nachgeführten interferometrischen Zeilensensor, Grant Number: LE 992/7-3, EH 400/4-3, Projectnumber: 209933375