Zeiss DK7417:
PV=113.27 nm
PVpercent=94.04 nm
PVr=108.15 nm
RMS=13.84 nm

Masterball:
PV=59.87 nm
PVpercent=37.1 nm
PVr=39.31 nm
RMS=5.99 nm

Rectangle:
PV=49.99 nm
PVpercent=31.53 nm
PVr=49.99 nm
RMS=6.95 nm