DOI:	
title:	Dataset for the publication "Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements"
summary:	Given their superior dynamics, microprobes represent promising probe candidates for high-speed roughness measurement applications. Their disadvantage, however, lies in the fact that the volume of the microprobes silicon tip decreases dramatically during roughness measurement, and the unstable tip geometry leads to an increase in measurement uncertainty. To investigate the factors that influence tip geometry variation during roughness measurement, a rectangular-shaped tip characterizer was employed to characterize the tip geometry, and a method for reconstructing the tip geometry from the measured profile was introduced. Experiments were conducted to explore the ways in which the tip geometry is influenced by tip wear, probing force, and the relative movement of the tip with respect to the sample. The results indicate that tip fracture and not tip wear is the
main reason for tip volume loss, and that the lateral dynamic load on the tip during scanning mode is responsible for more tip fracture than are other factors.
creators:	Min Xu (5.1, ORCID 0000-0002-5115-5737), Ziqi Zhou (Institute of Production Measurement Technology (IPROM), Technische Universitt Braunschweig, Schleinitzstrae 20, 38106 Braunschweig, Germany), Thomas Ahbe (5.1), Erwin Peiner (Institute of Semiconductor Technology (IHT), Technische Universitt Braunschweig, Hans-Sommer-Strae 66, 38106 Braunschweig, Germany, ORCID 0000-0001-5801-813X), Uwe Brand (5.1, ORCID 0000-0002-4293-4982)
license:	CC-BY 4.0 International
keywords:	roughness measurement; piezoresistive microprobe; silicon fracture; tip characterization
classification:	INSPEC B70
project title:	MicroProbes Multifunctional ultrafast microprobes for on-the-machine measurements 
funder:	The results in this paper come from EMPIR 17IND05 MicroProbes, an EU-funded project. MicroProbes has received funding from the EMPIR program co-financed by the EU participating states and from the European Unions Horizon 2020 research and innovation program.
funder nr:	17IND05	
link to projekt homepage: https://www.ptb.de/empir2018/microprobes/

software: 

Description of the individual files

Each data file within this dataset is related to one figure of the related publication:
Xu et al. Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements. Sensors 2022, 22, 1298. https://doi.org/10.3390/s22031298

The data is named according to (figure No.)_(curve).txt. For example:
Fig9_260m.txt
|	|_data of the curve of 260m
|_______for Fig.9	

Files with the extension txt are space-separated tabular data which can be opened with any text editor 
