DOI:	[TO BE ASSIGNED]
title:	Dataset for the publication "Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements"
summary:	In this article we present an FEM analysis of the change in resonance behaviour of 5 mm long piezoresistive cantilevers when they are modified with pencil shaped diamond tips of varying length. In a setup with glued cantilever base the length of the fixed bearing was examined as well. Simulations show that for a free cantilever base length of one fifth of the base no base oscillations occur. Base oscillations only occur for higher order modes of resonance with free base lengths greater one fifth.
creators:	Heinrich Behle(5.1), Uwe Brand (5.1)
license:	CC-BY 4.0 International
keywords:	FEM, Mode analysis, diamond tips, piezoresistive Si-cantilever, roughness measurements
classification:	INSPEC B70
project title:	MicroProbes Multifunctional ultrafast microprobes for on-the-machine measurements 
funder:	The results in this paper come from EMPIR 17IND05 MicroProbes, an EU-funded project. MicroProbes has received funding from the EMPIR program co-financed by the EU participating states and from the European Unions Horizon 2020 research and innovation program.
funder nr:	17IND05
link to projekt homepage:	https://www.ptb.de/empir2018/microprobes/

software: Excel

Description of the individual files

Data file within this dataset is related to Fig.3 and Fig.4 of the related publication:
Behle et al. Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements. SMSI 2020 Conference  Sensor and Measurement Science International. https://DOI 10.5162/SMSI2020/P2.7

Files with the extension XLSX can be opened with Excel.Files with the extension TXT  are space-separated tabular data which can be opened with any text editor. 
